Model U701 UHP Liquid Flo-Sensor


The Model U701 Ultra-High-Purity (UHP) Flo-Sensor will precisely measure flow rates of virtually any fluid as low as 15 mL/minute or as high as 50 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This concept allows accurate flow measurement with no zero drift and no particle generation! PTFE, Kal-Rez®, and sapphire wetted surfaces insure compatibility with CMP slurries, acids, solvents, deionized water, photodeveloper solutions, and most other high-purity fluids.

The Model U701 UHP Flo-Sensor integrates this microturbine design with advanced electronics to provide a passive BOSFET pulse signal, frequency proportional to flow rate. Patented* McMillan design means long life expectancy under normal operating conditions - over 50,000 hours MTBF (ongoing testing).

Each unit is individually calibrated before shipment, and a certificate of calibration accompanies all Flo-Sensors. ±0.2% full-scale repeatability reassures process engineers that results will be consistent. An optional temperature rating of 0-90°C allows use in most UHP applications.


Wetted Parts

Wetted Parts:  PTFE, Kal-Rez®, and sapphire.